Illumination and multi-step OPC optimization to enhance process margin of the 65nm node device exposed by dipole illumination
- 著者名:
Soo-Han Choi Tae-Hoon Park Eunsung Kim Hyoung-Joo Youn Dae-Youp Lee Yong-Chan Ban A-Young Je Dong-Hyun Kim Ji-Suk Hong Yoo-Hyon Kim Moon-Hyun Yoo Jeong-Taek Kong - 掲載資料名:
- Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5754
- 発行年:
- 2005
- パート:
- 2
- 開始ページ:
- 838
- 終了ページ:
- 845
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457349 [0819457345]
- 言語:
- 英語
- 請求記号:
- P63600/5754
- 資料種別:
- 国際会議録
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