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CVD silicon carbide mirrors for EUV applications

著者名:
掲載資料名:
Silicon carbide materials for optics and precision structures : 12-13 July 1995 San Diego, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2543
発行年:
1995
開始ページ:
173
終了ページ:
179
総ページ数:
7
出版情報:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819419026 [0819419028]
言語:
英語
請求記号:
P63600/2543
資料種別:
国際会議録

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