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Subwavelength photoresist grating metrology using scatterometry

著者名:
掲載資料名:
Application and theory of periodic structures : 10-12 July, 1995, San Diego, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2532
発行年:
1995
開始ページ:
251
終了ページ:
261
総ページ数:
11
出版情報:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819418913 [0819418919]
言語:
英語
請求記号:
P63600/2532
資料種別:
国際会議録

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