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Atmospheric rf plasma coating of indium and tin oxide films

著者名:
掲載資料名:
Optical materials technology for energy efficiency and solar energy conversion XIV : 12-13 July 1995, San Diego, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2531
発行年:
1995
開始ページ:
333
終了ページ:
344
総ページ数:
12
出版情報:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819418906 [0819418900]
言語:
英語
請求記号:
P63600/2531
資料種別:
国際会議録

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