Stochastic interactions in particle-projection systems: comparison of theory and Monte Carlo simulations

Stochastic interactions in particle-projection systems: comparison of theory and Monte Carlo simulations

著者名:

掲載資料名:

Electron-beam sources and charged-particle optics : 10-14 July 1995, San Diego, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2522

発行年:

1996

開始ページ:

351

終了ページ:

362

総ページ数:

12

出版情報:

Bellingham, WA: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819418814 [0819418811]

言語:

英語

請求記号:

P63600/2522

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00057724
シリーズID:	PA00000029
会議名:	Symposium on electron-beam sources and charged-particle optics
回次:	1995
会議開催地:	San Diego, CA, USA
会議開催年:	1995.07.10-1995.07.14
論文注記:	1995 Symposium on electron-beam sources and charged-particle optics, July 10-14, 1995, San Diego, CA, USA. 2522-39

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