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Metrology of etched quartz and chrome embedded phase shift gratings using scatterometry

著者名:
掲載資料名:
Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2439
発行年:
1995
開始ページ:
479
終了ページ:
494
総ページ数:
16
出版情報:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417879 [0819417874]
言語:
英語
請求記号:
P63600/2439
資料種別:
国際会議録

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