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Characterization of aluminum nitride thin films grown by plasma source molecular-beam epitaxy

著者名:
掲載資料名:
Laser-induced damage in optical materials, 1994 : 26th Annual Boulder Damage Symposium, proceedings, 24-26, October, 1994, Boulder, Colorado
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2428
発行年:
1995
開始ページ:
362
終了ページ:
369
総ページ数:
8
出版情報:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417763 [0819417769]
言語:
英語
請求記号:
P63600/2428
資料種別:
国際会議録

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