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Single-crystal silicon beams formed by merged epitaxial lateral overgrowth (MELO) for optical reflectors

著者名:
掲載資料名:
Micro-optics/micromechanics and laser scanning and shaping : 7-9 February 1995, San Jose, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2383
発行年:
1995
開始ページ:
146
終了ページ:
153
総ページ数:
8
出版情報:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819417305 [0819417300]
言語:
英語
請求記号:
P63600/2383
資料種別:
国際会議録

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