Process monitoring and control of integrated-circuit manufacturing using Fourier transform infrared spectroscopy

Process monitoring and control of integrated-circuit manufacturing using Fourier transform infrared spectroscopy

著者名:

掲載資料名:

Optical sensors for environmental and chemical process monitoring : 9-10 November 1994, McLean, Virginia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2367

発行年:

1995

開始ページ:

171

終了ページ:

182

総ページ数:

12

出版情報:

Bellingham, WA: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819417138 [0819417130]

言語:

英語

請求記号:

P63600/2367

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00057570
シリーズID:	PA00000029
会議名:	Symposium on optical sensors for environmental and chemical process monitoring
回次:	1994
会議開催地:	McLean, VA, USA
会議開催年:	1994.11.09-1994.11.10
論文注記:	1994 Symposium on optical sensors for environmental and chemical process monitoring, November 9-10, 1994, McLean, VA, USA. 2367-18

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