New approach to measuring oxide charge and mobile ion concentration

New approach to measuring oxide charge and mobile ion concentration

著者名:

掲載資料名:

Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2337

発行年:

1994

開始ページ:

154

終了ページ:

164

総ページ数:

11

出版情報:

Bellingham, WA: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819416704 [0819416703]

言語:

英語

請求記号:

P63600/2337

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00057540
シリーズID:	PA00000029
会議名:	Symposium on optical characterization techniques for high-performance microelectronic device manufacturing
回次:	1994
会議開催地:	Austin, TX, USA
会議開催年:	1994.10.20
論文注記:	1994 Symposium on optical characterization techniques for high-performance microelectronic device manufacturing, October 20, 1994, Austin, TX, USA. 2337-19

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