The Mechanical Properties of TiN Films Grown by a Pure N<sub>2</sub> Plasma Sputtering

The Mechanical Properties of TiN Films Grown by a Pure N₂ Plasma Sputtering

著者名:

掲載資料名:

Advanced Materials Design and Mechanics IV : selected, peer reviewed papers from the 4th International Conference on Advanced Materials Design and Mechanics (ICAMDM 2016), August 20-21, 2016, Jeju Island, South Korea

シリーズ名:

Materials science forum

シリーズ巻号:

878

発行年:

2017

開始ページ:

89

終了ページ:

95

総ページ数:

7

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISBN:

9783035710601 [3035710600]

言語:

英語

請求記号:

M23650 [v.878]

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00061335
シリーズID:	PA00000012
会議名:	International Conference on Advanced Materials Design and Mechanics : ICAMDM
回次:	4th
会議開催地:	Jeju Island, South Korea
会議開催年:	2016.08.20-2016.08.21
論文注記:	4th International Conference on Advanced Materials Design and Mechanics (ICAMDM 2016), August 20-21, 2016, Jeju Island, South Korea

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The Mechanical Properties of TiN Films Grown by a Pure N2 Plasma Sputtering

類似資料:

The Mechanical Properties of TiN Films Grown by a Pure N₂ Plasma Sputtering