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Study on Influence of Silicon Crystal Dislocation on Removal in Atmospheric Pressure Plasma Polishing

著者名:
掲載資料名:
Advanced Materials Design and Mechanics IV : selected, peer reviewed papers from the 4th International Conference on Advanced Materials Design and Mechanics (ICAMDM 2016), August 20-21, 2016, Jeju Island, South Korea
シリーズ名:
Materials science forum
シリーズ巻号:
878
発行年:
2017
開始ページ:
83
終了ページ:
88
総ページ数:
6
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISBN:
9783035710601 [3035710600]
言語:
英語
請求記号:
M23650 [v.878]
資料種別:
国際会議録

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