(382d) Silicon-Containing Block Copolymers for Sub-20 Nm Pitch Patterning

(382d) Silicon-Containing Block Copolymers for Sub-20 Nm Pitch Patterning

著者名:

掲載資料名:

Engineering Sciences and Fundamentals 2013 : Core Programming Area at the 2013 AIChE Annual Meeting: Global Challenges for Engineering a Sustainable Future : San Francisco, California, USA, 3-8 November 2013

シリーズ名:

AIChE Conference Proceedings

シリーズ巻号:

2013

発行年:

2013

パート:

2

開始ページ:

608

終了ページ:

608

総ページ数:

1

出版情報:

New York: American Institute of Chemical Engineers

ISBN:

9781634390392 [1634390393]

言語:

英語

請求記号:

A08000/2013 [CD-ROM]

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00061242
シリーズID:	PA00000008
会議名:	AIChE Annual Meeting
回次:	2013
会議開催地:	San Francisco, CA, USA
会議開催年:	2013.11.03-2013.11.08
論文注記:	2013 AIChE Annual Meeting. Engineering Sciences and Fundamentals, San Francisco, California, USA, 3-8 November 2013

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