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(382d) Silicon-Containing Block Copolymers for Sub-20 Nm Pitch Patterning

著者名:
掲載資料名:
Engineering Sciences and Fundamentals 2013 : Core Programming Area at the 2013 AIChE Annual Meeting: Global Challenges for Engineering a Sustainable Future : San Francisco, California, USA, 3-8 November 2013
シリーズ名:
AIChE Conference Proceedings
シリーズ巻号:
2013
発行年:
2013
パート:
2
開始ページ:
608
終了ページ:
608
総ページ数:
1
出版情報:
New York: American Institute of Chemical Engineers
ISBN:
9781634390392 [1634390393]
言語:
英語
請求記号:
A08000/2013 [CD-ROM]
資料種別:
国際会議録

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