586a. Controlling Ultrashallow Junction Formation through Surface Chemistry

586a. Controlling Ultrashallow Junction Formation through Surface Chemistry

著者名:

掲載資料名:

2005 annual meeting & fall showcase : '05 AIChE, Oct 30 - Nov 4 : conference proceedings, Cincinnati Convention Center, Cincinnati, OH : non-topical presentation records : 08. Materials Engineering and Sciences Division

シリーズ名:

AIChE Conference Proceedings

シリーズ巻号:

P-221(2)

発行年:

2005

総ページ数:

1

出版情報:

New York: American Institute of Chemical Engineers

ISBN:

9780816909964 [0816909962]

言語:

英語

請求記号:

A08000/2005 [CD-ROM]

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00061199
シリーズID:	PA00000008
会議名:	AIChE Annual Meeting
回次:	2005
会議開催地:	Cincinnati, OH, USA
会議開催年:	2005.10.30-2005.11.04
論文注記:	AIChE 2005 Annual Meeting, Oct 30-Nov 4, Cincinnati, OH

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