Ultra-Fast SiC Wafer Surface Roughness Mapping
- 著者名:
- 掲載資料名:
- Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 858
- 発行年:
- 2016
- 開始ページ:
- 489
- 終了ページ:
- 492
- 総ページ数:
- 4
- 出版情報:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9783035710427 [3035710422]
- 言語:
- 英語
- 請求記号:
- M23650 [v.858]
- 資料種別:
- 国際会議録
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2
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SiC Epitaxial Growth on Multiple 100-mm Wafers and its Application to Power-Switching Devices
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Exploration of Bulk and Epitaxy Defects in 4H-SiC Using Large Scale Optical Characterization
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