Optimization of Silicon-Based Fabrication Process Modeling for Optical Modulator

Optimization of Silicon-Based Fabrication Process Modeling for Optical Modulator

著者名:

掲載資料名:

Main Tendencies in Applied Materials Science : Selected, peer reviewed papers from the 28th Regional Conference on Solid State Science and Technology 2014 (RCSSST 2014), November 25-27, 2014, Cameron Highlands, Pahang, Malaysia

シリーズ名:

Materials science forum

シリーズ巻号:

846

発行年:

2016

開始ページ:

230

終了ページ:

236

総ページ数:

7

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9783038357520 [3038357529]

言語:

英語

請求記号:

M23650 [v.846]

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054303
シリーズID:	PA00000012
会議名:	Regional Conference on Solid State Science and Technology (RCSSST 2014)
回次:	28th
会議開催地:	Cameron Highlands, Pahang, Malaysia
会議開催年:	2014.11.25-2014.11.27
論文注記:	28th Regional Conference on Solid State Science and Technology 2014 (RCSSST 2014), November 25-27, 2014, Cameron Highlands, Pahang, Malaysia

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