Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
- 著者名:
- 掲載資料名:
- Advanced Functional Materials : Selected, peer reviewed papers from the Chinese Materials Congress 2014 (CMC 2014), July 4-7, 2014, Chengdu, China
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 815
- 発行年:
- 2015
- 開始ページ:
- 8
- 終了ページ:
- 13
- 総ページ数:
- 6
- 出版情報:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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