Study on Reactive Species in Catalyst-Referred Etching of 4H-SiC using Platinum and Hydrofluoric Acid

Study on Reactive Species in Catalyst-Referred Etching of 4H-SiC using Platinum and Hydrofluoric Acid

著者名:

掲載資料名:

Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation

シリーズ名:

Materials science forum

シリーズ巻号:

740-742

発行年:

2013

開始ページ:

847

終了ページ:

850

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054223
シリーズID:	PA00000012
会議名:	European Conference on Silicon Carbide and Related Materials (ECSCRM 2012)
回次:	9th
会議開催地:	St. Petersburg, Russian Federation
会議開催年:	2012.09.02-2012.09.06
論文注記:	9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation

類似資料:

1 国際会議録 Abrasive-Free Planarization of 3-Inch 4H-SiC Substrate Using Catalyst-Referred Etching T. Okamoto, Y. Sano, K. Tachibana, K. Arima, A.N. Hattori Trans Tech Publications	7 国際会議録 4H-SiC Planarization Using Catalyst-Referred Etching with Pure Water A. Isohashi, Y. Sano, S. Sadakuni, K. Yamauchi Trans Tech Publications
2 国際会議録 Study of Terminated Species on 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching P.V. Bui, S. Sadakuni, T. Okamoto, K. Arima, Y. Sano Trans Tech Publications	8 国際会議録 Planarization of 6-Inch 4H-SiC Wafer Using Catalyst-Referred Etching A. Isohashi, Y. Sano, T. Kato, K. Yamauchi Trans Tech Publications
3 国際会議録 Reduction of Surface Roughness of 4H-SiC by Catalyst-Referred Etching T. Okamoto, Y. Sano, H. Hara, T. Hatayama, K. Arima Trans Tech Publications	9 国際会議録 TEM Observation of 8 Deg Off-Axis 4H-SiC (0001) Surfaces Planarized by Catalyst-Referred Etching S. Sadakuni, N.X. Dai, Y. Sano, K. Arima, K. Yagi Trans Tech Publications
4 国際会議録 Damage-Free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching H. Hara, Y. Sano, H. Mimura, K. Arima, A. Kubota, K. Yagi, J. Murata, K. Yamauchi Trans Tech Publications	10 国際会議録 Investigation of the Barrier Heights for Dissociative Adsorption of HF on SiC Surfaces in the Catalyst-Referred Etching Process P.V. Bui, K. Inagaki, Y. Sano, K. Yamauchi, Y. Morikawa Trans Tech Publications
5 国際会議録 Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution T. Okamoto, Y. Sano, H. Hara, K. Arima, K. Yagi Trans Tech Publications	11 国際会議録 Fabrication of Electrostatically Actuated 4H-SiC Microcantilever Resonators by Using n/p/n Epitaxial Structures and Doping-Selective Electrochemical Etching K. Sato, K. Adachi, H. Okamoto, H. Yamaguchi, T. Kimoto Trans Tech Publications
6 国際会議録 High-Resolution TEM Observation of 4H-SiC (0001) Surface Planarized by Catalyst-Referred Etching B.V. Pho, S. Sadakuni, T. Okamoto, R. Sagawa, K. Arima Trans Tech Publications	12 国際会議録 Fabrication of microstructure using electrochemical etching in hydrofluoric acid Huang, J.-Y., Tsai, H.-Y., Wu, C.-H., Su, C.-C., Fan, C.-H. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12