Large-Area Mapping of Dislocations in 4H-SiC from Carbon-Face (000-1) by Using Vaporized KOH Etching near 1000°C
- 著者名:
- 掲載資料名:
- Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 740-742
- 発行年:
- 2013
- 開始ページ:
- 829
- 終了ページ:
- 832
- 総ページ数:
- 4
- 出版情報:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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4
国際会議録
Dislocation Revelation in Highly Doped N-Type 4H-SiC by Molten KOH Etching with Na2O2 Additive
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11
国際会議録
Characterization of Dislocation Structures in Hexagonal SiC by Transmission Electron Microscopy
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