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Chloride-Based CVD of 4H-SiC at High Growth Rates on Substrates with Different Off-Angles

著者名:
掲載資料名:
Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA
シリーズ名:
Materials science forum
シリーズ巻号:
717-720
発行年:
2012
パート:
1
開始ページ:
113
終了ページ:
116
総ページ数:
4
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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