A Study on Adhesive Properties of a Damascene Electroplated Cu Composite Sheet
- 著者名:
- 掲載資料名:
- Eco-materials processing and design XII : selected, peer reviewed papers from the 12th International Symposium on Eco-Materials Processing and Design, January 8-11, 2011, Chiang Mai, Thailand
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 695
- 発行年:
- 2011
- 開始ページ:
- 577
- 終了ページ:
- 580
- 総ページ数:
- 4
- 出版情報:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
類似資料:
Trans Tech Publications |
Materials Research Society |
2
国際会議録
Integration using inorganic BARC in a via-first dual-damascene process with low-k dielectric
SPIE - The International Society of Optical Engineering |
MRS - Materials Research Society |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
Materials Research Society |
Trans Tech Publications |
Trans Tech Publications |