Structure and Mechanical Properties of AlCrN Thin Films Deposited by Magnetron Sputtering

Structure and Mechanical Properties of AlCrN Thin Films Deposited by Magnetron Sputtering

著者名:

掲載資料名:

Eco-materials processing and design XII : selected, peer reviewed papers from the 12th International Symposium on Eco-Materials Processing and Design, January 8-11, 2011, Chiang Mai, Thailand

シリーズ名:

Materials science forum

シリーズ巻号:

695

発行年:

2011

開始ページ:

182

終了ページ:

185

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054192
シリーズID:	PA00000012
会議名:	International Symposium on Eco-Materials Processing and Design
回次:	12th
会議開催地:	Chiang Mai, Thailand
会議開催年:	2011.01.08-2011.01.11
論文注記:	12th International Symposium on Eco-Materials Processing and Design, January 8-11, 2011, Chiang Mai, Thailand

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