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Vacuum Adhesive Bonding and Stress Isolation for MEMS Resonant Pressure Sensor Package

著者名:
掲載資料名:
Frontier of nanoscience and technology : Selected, peer reviewed papers from the international conference on Frontier of Nanoscience and Technology (ICFNST 2011), held in Kunming, China, 28-29 September 2011
シリーズ名:
Materials science forum
シリーズ巻号:
694
発行年:
2011
開始ページ:
896
終了ページ:
900
総ページ数:
5
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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