The Effect of Target to Substrate Distance on the Properties of HAZO Films Deposited by Magnetron Sputtering

The Effect of Target to Substrate Distance on the Properties of HAZO Films Deposited by Magnetron Sputtering

著者名:

掲載資料名:

Energy, environment and biological materials : selected, peer reviewed papers from 11th IUMRS International Conference in Asia (IUMRS-ICA 2010), 25-28 September 2010, Qingdao, China

シリーズ名:

Materials science forum

シリーズ巻号:

685

発行年:

2011

開始ページ:

134

終了ページ:

140

総ページ数:

7

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054182
シリーズID:	PA00000012
会議名:	IUMRS International Conference in Asia (IUMRS-ICA 2010)
回次:	11th
会議開催地:	Qingdao, China
会議開催年:	2010.09.25-2010.09.28
論文注記:	11th IUMRS International Conference in Asia (IUMRS-ICA 2010), 25-28 September 2010, Qingdao, China

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