Growth of Cubic AIN Films on Sapphire(0001) with Atomic Scale Surface Smoothness by Pulsed Laser Deposition

Growth of Cubic AIN Films on Sapphire(0001) with Atomic Scale Surface Smoothness by Pulsed Laser Deposition

著者名:

掲載資料名:

THERMEC 2009, 6th International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, Berlin, Germany, August 25-29, 2009

シリーズ名:

Materials science forum

シリーズ巻号:

638-642

発行年:

2010

パート:

3

開始ページ:

2921

終了ページ:

2926

総ページ数:

6

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054152
シリーズID:	PA00000012
会議名:	International Conference on Processing & Manufacturing of Advanced Materials
回次:	6th
会議開催地:	Berlin, Germany
会議開催年:	2009.08.25-2009.08.29
論文注記:	6th International Conference on Processing & Manufacturing of Advanced Materials, Berlin, Germany, August 25-29, 2009

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