Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane

Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane

著者名:

掲載資料名:

Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007

シリーズ名:

Materials science forum

シリーズ巻号:

600-603

発行年:

2009

パート:

1

開始ページ:

51

終了ページ:

54

総ページ数:

4

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00054132
シリーズID:	PA00000012
会議名:	International Conference on Silicon Carbide and Related Materials
回次:	2007
会議開催地:	Otsu, Japan
会議開催年:	2007.10.14-2007.10.19
論文注記:	International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007

類似資料:

1 国際会議録 Modeling Analysis of SiC CVD in the Horizontal Hot Wall Reactors Semennikov, A.K., Talalaev, R.A., Vorob'ev, A.N., Makarov, Yu.N. Electrochemical Society	7 国際会議録 Inverse-Computation Design of a SiC Bulk Crystal Growth System Kulik, Alexey V., Demina, Sventlana E., Kochuguev, Sergey K., Ofengeim, Dmitry Kh., Karpov, Sergey Yu., Vorob'ev, Andrey … Materials Research Society
2 国際会議録 Analysis of SiC CVD Growth in a Horizontal Hot-Wall Reactor by Experiment and 3D Modelling Y. Shishkin, R.L. Myers-Ward, S.E. Saddow, A. Galyukov, A. Vorob'ev, D. Brovin, D. Bazarevskiy, R. Talalaev, Y.N. … Trans Tech Publications	8 国際会議録 Modeling Analysis of Gas-Phase Generated Silicon Clusters in a Rotating Disk CVD Reactor Vorob'ev, A., Makarov, N.Y., Karpov, S.U. Electrochemical Society
3 国際会議録 Influence of Silicon Gas-to-Particle Conversion on SiC CVD in a Cold-Wall Rotating-Disc Reactor Vorob'ev, A.N., Bogdanov, M.V., Komissarov, A.E., Karpov, S.Yu., Bord, O.V., Lovtsus, A.A., Makarov, Yu.N. Trans Tech Publications	9 国際会議録 Computational experiment of CVD of SiC: Growth rate, C/Si ratio, parasitic phase formation Vorob'ev, Andrei N., Komissarov, Alexandre E., Bogdanov, Maxim V., Karpov, Sergey Yu., Bord, Olga V., Zhmakin, Alexandre … MRS-Materials Research Society
4 国際会議録 Modeling Analysis of Temperature Field and Species Transport Inside the System for Sublimation Growth of SiC in Tantalum Container Egorov,Yu.E., Galyukov,A.O., Gurevich,S.G., Makarov,Yu.N., Mokhov,E.N., Ramm,M.G., Ramm,M.S., Roenkov,A.D., Segal,A.S., … Trans Tech Publications	10 国際会議録 Experimental and Theoretical Analysis of Heat and Mass Transport in the System for AlN Bulk Crystal Growth Bogdanov, M.V., Karpov, S.Yu., Kulik, A.V., Ramm, M.S., Makarov, Yu.N., Schlesser, R., Dalmau, R.F., Sitar, Z. Materials Research Society
5 国際会議録 Critical Issues in Group-III Nitride MOVPE Modeling Yakovlev, E., Talalaev, R., Vorob'ev, A., Makarov, Y. Electrochemical Society	11 国際会議録 Modeling Analysis of Free-Spreading Sublimation Growth of SiC Crystals Bogdanov, M.V., Demina, S.E., Karpov, S.Yu., Kulik, A.V., Ofengeim, D.Kh., Ramm, M.S., Mokhov, E.N., Roenkov, A.D., … Materials Research Society
6 国際会議録 Theoretical Analysis of the Mass Transport in the Powder Charge in Long-Term Bulk SiC Growth Kulik, A.V., Bogdanov, M.V., Karpov, S.Yu., Ramm, M.S., Makarov, Yu.N. Trans Tech Publications	12 国際会議録 Modeling Analysis of SiC CVD in a Planetary Reactor Vorob'ev, A.N., Semennikov, A.K., Zhmakin, A.I., Makarov, Yu.N., Dauelsberg, M., Wischmeyer, F., Heuken, M., Juergensen, … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12