Advanced Annealing Schemes for High-Performance SOI Logic Technologies

Advanced Annealing Schemes for High-Performance SOI Logic Technologies

著者名:: T. Feudel
掲載資料名:: Rapid thermal processing and beyond : applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany
シリーズ名:: Materials science forum
シリーズ巻号:: 573-574
発行年:: 2008
開始ページ:: 387
終了ページ:: 402
総ページ数:: 16
出版情報:: Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:: 02555476
言語:: 英語
請求記号:: M23650
資料種別:: 国際会議録

詳細

TDL書誌ID:	ZA00054119
シリーズID:	PA00000012

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