Blank Cover Image

Laser Annealing of Implanted Semiconductor Layers - One Bridge to Nano-Processing

著者名:
H.D. Geiler  
掲載資料名:
Rapid thermal processing and beyond : applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany
シリーズ名:
Materials science forum
シリーズ巻号:
573-574
発行年:
2008
開始ページ:
237
終了ページ:
256
総ページ数:
20
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

類似資料:

1 国際会議録 Nondestructive and Contactless Evaluation of Electrical and Thermal Properties of Thin Semiconducting Layers

Geiler,H.-D.

Trans Tech Publications
7 国際会議録 LIGHT-INDUCED, SHORT-TIME ANNEALING OF SILICON-IMPLANTED LAYERS

Wouters, D., Maes, H. E.

Materials Research Society
2 国際会議録 Characteristics of interpoly oxides optimized by conventional processing and laser annealing

Eggermont, G.E.J., Rodeen, H.D., Brors, D.L.

North Holland
8 国際会議録 SELECTIVE LASER ANNEALING FOR DEVICE PROCESSING

Calder, I. D., Naem, A. A., Naguib, H. H.

North-Holland
3 国際会議録 Photoelastic imaging of process induced defects in 300mm-silicon wafers

Geiler, H. D., Kurner, W., Storbeck, O.

MRS-Materials Research Society
9 国際会議録 RAMAN STUDIES OF CARRIER ACTIVATION IN LASER ANNEALED GaAS CAPPED WITH SILICON NITRIDE

Compaan, A., Abbi, S.C., Yao, H.D., Bhat, A., Hashmi, F.

Materials Research Society
4 国際会議録 X-RAY AND RAMAN TOPOGRAPHIC STUDIES OF GaAs IMPLANTED WITH 28Si+ AND PULSED LASER ANNEALED

Bowman, Jr., R.C., Knudsen, J.F., Adams, P.M., Yao, H.D., Compaan, A.D.

Materials Research Society
10 国際会議録 Optimization of Support Temperature in RTA-Tools by Scanning Infrared Depolarization Imaging of Monitor Wafers

Geiler, H.-D., Karge, H., Krimbacher, B.

Electrochemical Society
5 国際会議録 * Analysis of Pinmark Induced Defects after RTP

Niess, J., Dietl, W., Altug, O., Lerch, W., Geiler, H.D., Karge, H.

Electrochemical Society
11 国際会議録 LATERAL CONFINEMENT OF SILICIDE LAYERS SYNTHESIZED WITH HIGH DOSE IMPLANTATION AND ANNEALING

White, Alice E., Short, K. T., Berger, S. D., Huggins, H., A., Loretto, D.

Materials Research Society
6 国際会議録 *LASER ANNEALING OF ION IMPLANTED SEMICONDUCTORS

Narayan, J.

North-Holland
12 国際会議録 Experimental Study on Nano-TiAlN Coated Carbide Tools in Turning Austenitic Stainless Steel

H.D. Yang, Z. Ding

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12