Automated high-precision measurement of critical dimensions using the scanning probe microscope

Automated high-precision measurement of critical dimensions using the scanning probe microscope

著者名:

掲載資料名:

Metrology, inspection, and process control for microlithography XIII : 15-18 March, 1999, Santa Clara, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3677

発行年:

1999

巻:

2

開始ページ:

786

終了ページ:

795

総ページ数:

10

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819431516 [0819431516]

言語:

英語

請求記号:

P63600/3677

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052894
シリーズID:	PA00000029
会議名:	Metrology, inspection, and process control for microlithography
回次:	13th
会議開催地:	Santa Clara, California, USA
会議開催年:	1999.03.15-1999.03.18
論文注記:	Metrology, Inspection, and Process Control for Microlithography XIII, Santa Clara, California, USA, March 15-18, 1999

類似資料:

1 国際会議録 High-precision calibration of a scanning probe microscope(SPM)for pitch and overlay measurements Chernoff,D.A., Lohr,J.D., Hansen,D.P., Lines,M. SPIE-The International Society for Optical Engineering	7 国際会議録 Atomic force microscope (AFM) analysis of photoresist test structures for use in SEM as in-house linewidth standards D.A. Chernoff Society of Photo-optical Instrumentation Engineers
2 国際会議録 TuD9:Automated analysis of data mark microstructure in high-density optical disks Chernoff,D.A., Burkhead,D.L. SPIE - The International Society for Optical Engineering	8 国際会議録 Precision carbon nanotube tip for critical dimension measurement with atomic force microscope Wies, C., Lebert, R., Jagle, B., Juschkin, L., Sobel, F., Seitz, H., Walter, R., Laubis, C., Schoize, F., Biel, W., … SPIE - The International Society of Optical Engineering
3 国際会議録 Automated analysis of data mark microstructure of various media in the optical disk industry Cook,C.S., Chernoff,D.A., Burkhead,D.L. SPIE - The International Society for Optical Engineering	9 国際会議録 High-accuracy critical-dimension metrology using a scanning electron microscope Lowney,J.R., Vladar,A.E., Postek,M.T. SPIE-The International Society for Optical Engineering
4 国際会議録 "AFM length analysis of data marks: measuring jitter, asymmetry, process noise, and process position" Chernoff,D.A., Burkhead,D.L. SPIE-The International Society for Optical Engineering	10 国際会議録 Novel Nanosized Patterning Techniques Using An Electropulsed Scanning Probe Microscope Melo, L.V., Brogueira, P. Materials Research Society
5 国際会議録 Picometer-scole accuracy in pitch metrology by optical diffraction and atomic force microscopy D. A. Chernoff, E. Buhr, D. L. Burkhead, A. Diener Society of Photo-optical Instrumentation Engineers	11 国際会議録 SCANNING PROBE MICROSCOPES AND THEIR APPLICATIONS Sohn L. L., Black T. C., Eriksson M., Crommie M., Hess H. Kluwer Academic Publishers
6 国際会議録 Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements N. Dorozhovets, T. Hausotte, G. Jaeger, E. Manske SPIE - The International Society of Optical Engineering	12 国際会議録 Automated discrimination of shapes in high dimensions L. Lieu, N. Saito Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12