Evaluation of Barrier CMP Slurries and Characterization of ULK Material Properties Shifts Due to CMP
- 著者名:
- 掲載資料名:
- Dielectrics for nanosystems 3: materials science, processing, reliability, and manufacturing
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 13(2)
- 発行年:
- 2008
- 開始ページ:
- 293
- 終了ページ:
- 306
- 総ページ数:
- 14
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566776271 [1566776279]
- 言語:
- 英語
- 請求記号:
- E23400/13-2
- 資料種別:
- 国際会議録
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