Evaluation of Surface Defects in Silicon on Insulator using Modified HF Defects and Cu Decoration Method (HCM)

Evaluation of Surface Defects in Silicon on Insulator using Modified HF Defects and Cu Decoration Method (HCM)

著者名:

掲載資料名:

Analytical and diagnostic techniques for semiconductor materials, devices and processes 7

シリーズ名:

ECS transactions

シリーズ巻号:

11(3)

発行年:

2007

開始ページ:

207

終了ページ:

212

総ページ数:

6

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775694 [1566775698]

言語:

英語

請求記号:

E23400/11-3

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013285
シリーズID:	PA00000034
会議名:	ECS Meeting
回次:	212th
会議開催地:	Washington, DC, USA
会議開催年:	2007.10.07-2007.10.12
論文注記:	212th ECS Meeting, October 7 - October 12, 2007, Washington, DC

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