Verification of a Method to Detect Grown-in Oxide Precipitate Nuclei in Czochralski Silicon
- 著者名:
- 掲載資料名:
- Analytical and diagnostic techniques for semiconductor materials, devices and processes 7
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 11(3)
- 発行年:
- 2007
- 開始ページ:
- 161
- 終了ページ:
- 171
- 総ページ数:
- 11
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775694 [1566775698]
- 言語:
- 英語
- 請求記号:
- E23400/11-3
- 資料種別:
- 国際会議録
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5
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The Role of Vacancies and Oxygen for Setting up an Efficient Getter for Cu and Ni in Silicon Wafers
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