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Optimization of Low-Loss Al2O3 Waveguide Fabrication for Application in Active Integrated Optical Devices

著者名:
掲載資料名:
Science and Technology of Dielectrics for Active and Passive Photonic Devices
シリーズ名:
ECS transactions
シリーズ巻号:
3(11)
発行年:
2006
開始ページ:
17
終了ページ:
26
総ページ数:
10
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775151 [1566775159]
言語:
英語
請求記号:
E23400/3-11 [11]
資料種別:
国際会議録

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