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Influence of Discharge Gas Pressure on Structural Properties of SnO2 Thin Films Deposited by Reactive Magnetron Sputtering

著者名:
掲載資料名:
Advances on materials engineering : selected, peer reviewed papers from the 2013 International Conference on Materials Engineering (ICMEN 2013), May 17-19, 2013, Nanjing, China
シリーズ名:
Applied mechanics and materials
シリーズ巻号:
377
発行年:
2013
開始ページ:
217
終了ページ:
221
総ページ数:
5
出版情報:
Stafa-Zuerich: Trans Tech Publications
ISSN:
16609336
ISBN:
9783037858011 [303785801X]
言語:
英語
請求記号:
A69500/377
資料種別:
国際会議録

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