SiCP Selective Epitaxial Growth in Recessed Source/Drain Regions yielding to Drive Current Enhancement in n-channel MOSFET
類似資料:
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Trans Tech Publications |
Materials Research Society | |
Electrochemical Society |
10
国際会議録
A 0.18 μm CMOS Technology for Elevated Source/Drain MOSFETs Using Selective Silicon Epitaxy
Electrochemical Society |
Electrochemical Society |
11
国際会議録
Sub-Half Micron Elevated Source/Drain NMOSFETS by Low Temperature Selective Epitaxial Deposition
MRS - Materials Research Society |
Electrochemical Society |
Electrochemical Society |