Deep Trench Etching in Macroporous Silicon - Application to Photonic Crystal Gas Sensors
- 著者名:
- 掲載資料名:
- Porous semiconductors : a symposium held in memory of Vitali Parkhutik and Volker Lehmann
- シリーズ名:
- ECS transactions
- シリーズ巻号:
- 16(3)
- 発行年:
- 2008
- 開始ページ:
- 61
- 終了ページ:
- 67
- 総ページ数:
- 7
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566776493 [156677649X]
- 言語:
- 英語
- 請求記号:
- E23400/16-3
- 資料種別:
- 国際会議録
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