Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD
類似資料:
1
国際会議録
TuD3:Crystallization behavior of sputter-deposited nitrogen-doped amorphous Ge2Sb2Te5 thin films
SPIE - The International Society for Optical Engineering | |
2
国際会議録
Oxidant Effect on Resistance Switching Characteristics of HfO2 film Grown Atomic Layer Deposition
Electrochemical Society |
Trans Tech Publications |
Trans Tech Publications |
Materials Research Society |
Trans Tech Publications | |
Materials Research Society |
MRS-Materials Research Society |