Large Scaled ALD/PECVD Reactor for Flat Panel Display Application

Large Scaled ALD/PECVD Reactor for Flat Panel Display Application

著者名:

掲載資料名:

Atomic layer deposition applications 3

シリーズ名:

ECS transactions

シリーズ巻号:

11(7)

発行年:

2007

開始ページ:

31

終了ページ:

38

総ページ数:

8

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

19385862

ISBN:

9781566775731 [1566775736]

言語:

英語

請求記号:

E23400/11-7

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052897
シリーズID:	PA00000034
会議名:	Symposium on Atomic Layer Deposition Applications ; Meeting of the Electrochemical Society
回次:	3rd ; 212th
会議開催地:	Washington, DC, USA
会議開催年:	2007.10.08-2007.10.09
論文注記:	3rd Symposium on Atomic Layer Deposition Applications, 212th Meeting of the Electrochemical Society, Hilton Washington, Washington, DC, October 8-9, 2007

類似資料:

1 国際会議録 Development of ALD/PECVD Reactor for High Quality LTPS-TFTs Insulator K. Murata, N. Miyatake, Y. Mori, H. Tachibana, Y. Uraoka Electrochemical Society	7 国際会議録 Large 15-in. flat-panel display glass cockpit for general aviation aircraft Schaefer, L. H. SPIE-The International Society for Optical Engineering
2 国際会議録 New efficient light-emitting polymer diode for flat-panel display applications Cina,S., Baynes,N., Moons,E., Friend,R.H., Burroughes,J.H., Towns,C.R., Heeks,K., O'Dell,R., O'Conner,S., … SPIE-The International Society for Optical Engineering	8 国際会議録 Large flat panel profiler Freischlad,K.R. SPIE-The International Society for Optical Engineering
3 国際会議録 Flat-panel autostereoscopic display Tsai,C.-H., Lee,K., Hsueh,W.-J., Lee,C.K. SPIE-The International Society for Optical Engineering	9 国際会議録 A new laser bonding method of anisotropic conductive films in flat panel display and in semiconductor packaging (Invited Paper) [6107-01] Nam, G -J, Seo, M -H, Ryu, K -H, Kwak, N -H SPIE - The International Society of Optical Engineering
4 国際会議録 Integrating commercial flat panel displays for military applications Lorenzo,A.De, Librandi,R., Rothman,N. SPIE - The International Society for Optical Engineering	10 国際会議録 Flat panel display test and evaluation for U.S.military applications Quast,T., Marticello,D.N. SPIE-The International Society for Optical Engineering
5 国際会議録 Acquisition of flat panel displays for military applications Van Atta, Richard H., Goodell, Larry, Cohen, Brian S., Loppitz, Michael J., Marks, Michael B., Bardsley, Norman, Kimzey, … SPIE	11 国際会議録 Laser applications in the electronics and optoelectronics industry in Japan Washio,K. SPIE - The International Society for Optical Engineering
6 国際会議録 Large-area high-throughput high-resolution lithography systems for flat-panel displays and microelectronic modules (Invited Paper) Jain,K., Dunn,T.J., Farmiga,N., Zemel,M., Weisbecker,C. SPIE-The International Society for Optical Engineering	12 国際会議録 Flat panel displays in an underwater cockpit Soia,K.E. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12