Vacancy-Type Defects in MOSFETs with High-κ Gate Dielectrics Probed by Monoenergetic Positron Beams
類似資料:
Trans Tech Publications |
Electrochemical Society |
Trans Tech Publications |
Electrochemical Society |
3
国際会議録
Extensive Studies for Effects of Nitrogen Incorporation into Hf-Based High-k Gate Dielectrics
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Materials Research Society |
Materials Research Society |
11
国際会議録
Monoenergetic Positron Beam Studies of Near Surface Defects Induced by Low Dose Be-Implantation
Trans Tech Publications |
Materials Research Society |
Electrochemical Society |