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Effects of velocity and pressure distributions on material removal rate in polishing process

著者名:
  • Y. Li ( Chengdu Fine Optical Engineering Research Ctr., China )
  • J. Wang ( Chengdu Fine Optical Engineering Research Ctr., China )
  • Q. Xu ( Chengdu Fine Optical Engineering Research Ctr., China )
  • W. Yang ( Xiamen Univ., China )
  • Y. Guo ( Xiamen Univ., China )
掲載資料名:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7282
発行年:
2009
巻:
1
開始ページ:
72820G-1
終了ページ:
72820G-7
総ページ数:
7
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475428 [0819475424]
言語:
英語
請求記号:
P63600/7282
資料種別:
国際会議録

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