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Influence of slurry pH on material removal rate and surface roughness of super-precision polishing of LBO crystal

著者名:
  • J. Li ( Nanjing Univ. of Aeronautics and Astronautics, China )
  • Y. Zhu ( Nanjing Univ. of Aeronautics and Astronautics, China ) , ( Technical Institute of Physics and Chemistry, China )
  • D. Zuo ( Nanjing Univ. of Aeronautics and Astronautics, China )
  • C. Chen ( Technical Institute of Physics and Chemistry, China )
掲載資料名:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7282
発行年:
2009
巻:
1
開始ページ:
728209-1
終了ページ:
728209-5
総ページ数:
5
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475428 [0819475424]
言語:
英語
請求記号:
P63600/7282
資料種別:
国際会議録

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