Ni-PTFE electroformed micro parts by SU8-based UV-LIGA

Ni-PTFE electroformed micro parts by SU8-based UV-LIGA

著者名:

Y. Guo ( The Chinese Univ. of Hong Kong, Hong Kong, China )
Y. Wang ( The Chinese Univ. of Hong Kong, Hong Kong, China )
T. C. Kong ( The Chinese Univ. of Hong Kong, Hong Kong, China )
R. Du ( The Chinese Univ. of Hong Kong, Hong Kong, China )

掲載資料名:

Micro- and nanotechnology : materials, processes, packaging, and systems IV : 10-12 December 2008, Melbourne, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

7269

発行年:

2008

開始ページ:

72690O-1

終了ページ:

72690O-7

総ページ数:

7

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819475213 [0819475211]

言語:

英語

請求記号:

P63600/7269

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052795
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Micro- and Nanotechnology
回次:	2008 : 4th
会議開催地:	Melbourne, Australia
会議開催年:	2008.12.10-2008.12.12
論文注記:	Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV, 10-12 December 2008, Melbourne, Australia - Fabrication, 72690O, 7269-26

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