Blank Cover Image

The simulation analysis of the scatterfield microscopy for the critical dimensions measurement

著者名:
  • L. Chen ( Beijing Institute of Technology, China )
  • D. Sha ( Beijing Institute of Technology, China )
掲載資料名:
2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7160
発行年:
2009
開始ページ:
71602G-1
終了ページ:
71602G-10
総ページ数:
10
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819474049 [0819474045]
言語:
英語
請求記号:
P63600/7160
資料種別:
国際会議録

類似資料:

L. Chen, D. Sha

Society of Photo-optical Instrumentation Engineers

Donald A. Chernoff, David L. Burkhead

SPIE - The International Society of Optical Engineering

S. Wu, T. Zhou, D. Sha, J. Lin, L. Chen

Society of Photo-optical Instrumentation Engineers

L. Chen, L. Nie, T. Zhou, D. Sha

SPIE - The International Society of Optical Engineering

Feng, Y., Chen, L., Ren, J. R., Sha, D.

SPIE-The International Society for Optical Engineering

S. Wu, D. Sha, J. Lin, T. Zhou, L. Chen

Society of Photo-optical Instrumentation Engineers

L. Chen, L. Nie, T. Zhou, D. Sha

SPIE - The International Society of Optical Engineering

L. Qiu, W. Zhao, J. Guo, D. Sha

Society of Photo-optical Instrumentation Engineers

B. M. Barnes, L. P. Howard, J. Jun, P. Lipscomb, R. M. Silver

SPIE - The International Society of Optical Engineering

Puig. T, Martinez. M. L, Aurell. T. M, Sanchez. A, Chen, X-D, Munoz. S. J

Kluwer Academic Publishers

L. Qiu, Z. Feng, D. Sha

SPIE - The International Society of Optical Engineering

Z. Krivokapic, W.D. Heavlin, D.F. Kyser

Society of Photo-optical Instrumentation Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12