IC wafer defect detection using image segmentation based on cultural algorithms

IC wafer defect detection using image segmentation based on cultural algorithms

著者名:

Z. Pan ( South China Normal Univ., China )
L. Chen ( South China Normal Univ., China )
G. Zhang ( Sun Yat-Sen Univ., China )

掲載資料名:

Fourth International Symposium on Precision Mechanical Measurements

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

7130

発行年:

2008

巻:

2

開始ページ:

713046-1

終了ページ:

713046-6

総ページ数:

6

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819473646 [0819473642]

言語:

英語

請求記号:

P63600/7130

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052761
シリーズID:	PA00000029
会議名:	International Symposium on Precision Mechanical Measurements
回次:	2008 : 4th
会議開催地:	Hefei/Jiuhua Mountain, Anhui, China
会議開催年:	2008.08.25-2008.08.29
論文注記:	4th International Symposium on Precision Mechanical Measurements, 25-29 August 2008, Hefei/Jiuhua Mountain, Anhui, China - Session 8. Opto-Electronic Measurement and Image Processing, 713046, 7130-149

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