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High rate ablative formation of ultra-deep channels by self-adaptive Nd:YAG laser with dynamically adjustable passive Q-switch

著者名:
  • T. T. Basiev ( A. M. Prokhorov General Physics Institute, Russia )
  • A. V. Fedin ( V .A. Degtyarev Kovrov State Technological Academy, Russia )
  • S. V. Garnov ( A. M. Prokhorov General Physics Institute, Russia )
  • A. V. Gavrilov ( V. A. Degtyarev Kovrov State Technological Academy, Russia )
  • S. M. Klimentov ( A .M. Prokhorov General Physics Institute, Russia )
掲載資料名:
Fundamentals of laser assisted micro- and nanotechnologies : 25-28 June 2007, St. Petersburg, Russia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6985
発行年:
2008
開始ページ:
69850B-1
終了ページ:
69850B-5
総ページ数:
5
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471833 [0819471836]
言語:
英語
請求記号:
P63600/6985
資料種別:
国際会議録

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