Highly (h00) oriented growth of SrTiO3 thin films on Si(100) substrates by RF magnetron sputtering and their optical properties
- 著者名:
- J. H. Ma ( Shanghai Institute of Technical Physics, China )
- J. H. Pin ( Shanghai Institute of Technical Physics, China )
- Z. M. Huang ( Shanghai Institute of Technical Physics, China )
- Y. H. Gao ( Shanghai Institute of Technical Physics, China )
- T. Lin ( Shanghai Institute of Technical Physics, China )
- 掲載資料名:
- Sixth International Conference on Thin Film Physics and Applications : 25-28 September 2007, Shanghai, China
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6984
- 発行年:
- 2008
- 開始ページ:
- 69841Z-1
- 終了ページ:
- 69841Z-4
- 総ページ数:
- 4
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471826 [0819471828]
- 言語:
- 英語
- 請求記号:
- P63600/6984
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers | |
Trans Tech Publications |
8
国際会議録
Effect of Substrate Temperature on the Properties of Al-Doped ZnO Films by RF Magnetron Sputtering
Trans Tech Publications |
SPIE - The International Society of Optical Engineering |
Trans Tech Publications |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
国際会議録
Fabrication of LSGM Thin Film Electrolyte on LSCM Anode by RF Magnetron Sputtering for IT-SOFC
Trans Tech Publications |
Society of Photo-optical Instrumentation Engineers |
12
国際会議録
Substrate Temperature and La0.9Sr0.1Ga0.8Mg0.2O3-δ Electrolyte Film Growth by Radio Frequency …
Trans Tech Publications |