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Line width roughness (LWR) performance of novel surface conditioner solutions for immersion lithography

著者名:
  • B. J. Lu ( United Microelectronics Corp., Taiwan , China )
  • E. T. Liu ( United Microelectronics Corp., Taiwan , China )
  • A. Zeng ( United Microelectronics Corp., Taiwan , China )
  • A. Tseng ( United Microelectronics Corp., Taiwan , China )
  • S. Wu ( United Microelectronics Corp., Taiwan , China )
掲載資料名:
Advances in resist materials and processing technology XXV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6923
発行年:
2008
巻:
2
開始ページ:
69233G-1
終了ページ:
69233G-9
総ページ数:
9
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471086 [0819471089]
言語:
英語
請求記号:
P63600/6923
資料種別:
国際会議録

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