Blank Cover Image

Film thickness measurement tool with a stress measurement function

著者名:
  • M. Horie ( Dainippon Screen Manufacturing Co.,Ltd., Japan )
  • K. Akashika ( Dainippon Screen Manufacturing Co.,Ltd., Japan )
  • S. Shiota ( Dainippon Screen Manufacturing Co.,Ltd., Japan )
  • S. Yamaguchi ( Dainippon Screen Manufacturing Co.,Ltd., Japan )
  • K. Yamana ( Dainippon Screen Manufacturing Co.,Ltd., Japan )
掲載資料名:
Metrology, inspection, and process control for microlithography XXII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6922
発行年:
2008
巻:
2
開始ページ:
692235-1
終了ページ:
692235-6
総ページ数:
6
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471079 [0819471070]
言語:
英語
請求記号:
P63600/6922
資料種別:
国際会議録

類似資料:

1 国際会議録 Spectroscopic ellipsometer for ultra thin film

K. Akashika, S. Shiota, S. Yamaguchi, M. Horie, M. Kobayashi

Society of Photo-optical Instrumentation Engineers
7 国際会議録 Unification of input and output ends in polarization-maintaning optocal fiber stress sensor by synthesis of optical coherence function (Invited Paper) [6049-04]

He Z., Horie S., Hotate K., Ishikawa M., Yoshikuni Y.

SPIE - The International Society of Optical Engineering
2 国際会議録 UV-reflectometory for fast trench-depth measurement

M. Horie, S. Shiota, S. Yamaguchi, K. Yamana, M. Kobayashi

Society of Photo-optical Instrumentation Engineers
8 国際会議録 Film Thickness Monitor for CMP Processing

Atsuta, H., Hayashi, T., Hondo, N., Horie, M., Kimura, H., Okumura, K., Tsujimura, M., Yano, H., Yoshida, M.

Materials Research Society
3 国際会議録 Stress measurement system for process control

J. Akashika, M. Horie

Society of Photo-optical Instrumentation Engineers
9 国際会議録 STRESS DISTRIBUTION AND CRITIAL THICKNESSES OF THIN EPITAXIAL FILMS

Sharan, S., Jagannadham, K., Narayan, J.

Materials Research Society
4 国際会議録 Measurement of the dielectric function spectra of low dielectric constant using the spectroscopic ellipsometry

Horie, M., Postava, K., Yamaguchi, T., Akashika, K., Hayashi, H., Kitamura, F.

SPIE-The International Society for Optical Engineering
10 国際会議録 STRESS DISTRIBUTION AND CRITICAL THICKNESS OF THIN EPITAXIAL FILMS

Sharan, S., Narayan, J., Jagannadham, K.

Materials Research Society
5 国際会議録 Impact of built-in film thickness measurement in CMP process

Yano,H., Okumura,K., Kondo,N., Horie,M.

SPIE - The International Society for Optical Engineering
11 国際会議録 LITHIUM ION TRANSPORT CHARACTERISTICS THROUGH THE LICOO 2 THIN-FILM CATHODE AS A FUNCTION OF ITS THICKNESS

Lee, J.-K., Lee, S.-J., Lee, H.-K.S.-M.

Electrochemical Society
6 国際会議録 Spectroscopic multilayer film thickness measurement system

Horie,M., Fujiwara,N., Kokubo,M., Kakiuchida,H.

SPIE-The International Society for Optical Engineering
12 国際会議録 Airy-like internal reflection series applied in scatterometry and simulations of gratings [5858-35]

Antos, R., Mistrik, J., Yamaguchi, T., Horie, M., Visnovsky, S.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12