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The effect of KOH and KOH/IPA etching on the surface roughness of the silicon mold used for polymer waveguide imprinting

著者名:
掲載資料名:
Optoelectronic integrated circuits X
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6897
発行年:
2008
開始ページ:
689717-1
終了ページ:
689717-7
総ページ数:
7
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819470720 [0819470724]
言語:
英語
請求記号:
P63600/6897
資料種別:
国際会議録

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