The effect of KOH and KOH/IPA etching on the surface roughness of the silicon mold used for polymer waveguide imprinting
- 著者名:
- S. An ( Inha Univ., South Korea )
- S.-G. Lee ( Inha Univ., South Korea )
- B.-H. O ( Inha Univ., South Korea )
- H.-H. Kim ( Inha Univ., South Korea )
- S.-G. Park ( Inha Univ., South Korea )
- 掲載資料名:
- Optoelectronic integrated circuits X : 21-23 January 2008, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6897
- 発行年:
- 2008
- 開始ページ:
- 689717-1
- 終了ページ:
- 689717-7
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819470720 [0819470724]
- 言語:
- 英語
- 請求記号:
- P63600/6897
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
3
国際会議録
Fabrication of 45o-micro-reflector-ended polymer waveguides using one-step UV embossing technique
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
MRS - Materials Research Society |
Electrochemical Society |