Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays

著者名:

• U. Hofmann ( Fraunhofer Institute for Silicon Technology, Germany )
• M. Oldsen ( Fraunhofer Institute for Silicon Technology, Germany )
• H.-J. Quenzer ( Fraunhofer Institute for Silicon Technology, Germany )
• J. Janes ( Fraunhofer Institute for Silicon Technology, Germany )
• M. Heller ( Sensor Dynamics AG, Germany )

掲載資料名:

MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6887

発行年:

2008

開始ページ:

688706-1

終了ページ:

688706-15

総ページ数:

15

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470621 [0819470627]

言語:

英語

請求記号:

P63600/6887

資料種別:

国際会議録